Molybdenum Sputtering Targets

Molybdenum Sputtering Targets

01
Description
JSC POLEMA produces sintered and deformed semi-finished products (sheets, rods), plates, electrodes for melting glass, sputtering targets, trays and other parts, using oxide-reduced molybdenum powder with purity of 99.95-99.97% as the raw material.

Thanks to the low content of interstitial impurities and metallic impurities and the small-grain texture of the material, the finished products boast outstanding plastic properties.

Some of molybdenum's important features in terms of its industrial application include its high heat resistance, electric conductivity and heat conductivity, its relatively low thermal neutron capture cross-section with a volume weight almost twice lower than that of tungsten, etc. Molybdenum's resistance to creep and stress-rupture at high temperatures in a vacuum and in protective atmosphere (argon, hydrogen) is noticeably higher than the same properties of many metals used as the base for heat-resistant materials.

As a result of molybdenum's low temperature coefficient of linear expansion and its high melting point, it ensures the dependable functionality of structures made from molybdenum that operate at high temperatures.

Molybdenum's high thermal conductivity is several times greater than that of ordinarily used heat-resistant alloys, which prevents thermal stresses during rapid heating and cooling.

Molybdenum is resistant to the effects of acids, alkalis and resistive in many molten metals and liquid glasses.
02
specifications
Sputtering targets made from high-grade molybdenum are used in physical vacuum deposition technologies (PVD methods) for thin films and functional coatings in the production of solar battaries and integral circuits, in forming TFT-matrices of large-format LCD displays, and in other technical spheres.

Targets can be produced in the form of a set of end-joined parts of any width and any total set length.

Tolerances for dimensions and roughness are established based on the client's requests.


Product shape


Sheets, discs, and rings, tooled in accordance with the product drawing.


Sheet dimensions


  • thickness from 5 to 32 mm;
  • width up to 550 mm;
  • length up to 1500 mm.
03
advantages
Significant production experience
Strict quality control of manufactured products
Own R&D laboratory
Flexible discount system
04
Product names
You can get full list of products by contacting our sales managers.: export_polema@metholding.com тел.:+7 4872 25-06-76.
05
chemical composition
Guaranteed chemical composition of molybdenum products for sputtering targets

Grade Мо, %* Impurities, ppm, max
Fe Al Ni Si C O N ∑Me**
Mo 99.95-PM >99,95 100 50 50 100 100 70 50 <500

* Typical content of the base element Мо 99.97%

** Sum of metallic impurities

06
miscellaneous
Targets can be produced in the form of a set of end-joined parts of any width and any total set length.

Tolerances for dimensions and roughness are established based on the client's requests.
07
Application areas